Browsing Mechanical and Mechatronics Engineering by Subject "MEMS"
Now showing items 1-17 of 17
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Analysis and Modeling of Uncooled Microbolometers with Tunable Thermal Conductance
(University of Waterloo, 2009-05-20)Uncooled microbolometers have attracted significant interest due to their small size, low cost and low power consumption. As the application range of microbolometers broadens, increasing the dynamic range becomes one of ... -
The Application of MEMS Microphone Arrays to Aeroacoustic Measurements
(University of Waterloo, 2011-04-28)Aeroacoustic emissions were identified as a primary concern in the public acceptance of wind turbines. A review of literature involving sound localization was undertaken and led to the design of two microphone arrays to ... -
Applications of Reflectometry Towards the Development of MEMS Gas Sensors
(University of Waterloo, 2021-05-27)Reflectometry or reflectance spectroscopy is a relatively simple characterization technique based on the analysis of reflected light from a surface. Herein, reflectometry is used to attain significant insights towards the ... -
Automated Micromanipulation of Micro Objects
(University of Waterloo, 2011-08-26)In recent years, research efforts in the development of Micro Electro Mechanical Systems, (MEMS) including microactuators and micromanipulators, have attracted a great deal of attention. The development of microfabrication ... -
Design, Modelling, and Fabrication of a Low Frequency Piezoelectromagnetic Energy Harvester
(University of Waterloo, 2017-08-31)The growing demand for electricity has put enormous pressure on the current power grid infrastructure and has caused several major blackouts over the past few decades. As a result, there has been a shift towards a modernized ... -
Determination of the fracture strength of brittle material thin films at high temperature using MEMS
(University of Waterloo, 2020-01-27)Brittle materials are widely used as structural materials in microelectromechanical systems (MEMS). Their mechanical properties make them suitable for high-temperature environments where MEMS are exposed to different types ... -
Development Of a Novel Multi-disciplinary Design Optimization Scheme For Micro Compliant Devices
(University of Waterloo, 2008-09-25)The focus of this research is on the development of a novel multi-disciplinary design optimization scheme for micro-compliant devices. Topology optimization is a powerful tool that can address the need for a systematic ... -
Effect of phosphorus doping on Young's modulus and residual stress of polysilicon thin films
(University of Waterloo, 2010-08-31)On-chip characterization devices have been used to extract the Young’s modulus, average stress and stress gradient of polysilicon doped with phosphorus using thermal diffusion. Devices for extracting the Young’s modulus, ... -
A Large-Stroke Electrostatic Micro-Actuator
(University of Waterloo, 2011-01-17)Parallel-plate electrostatic actuators driven by a voltage difference between two electrodes suffer from an operation range limited to 30% of the gap that has significantly restrained their applications in Microelectromechanical ... -
Magnetic Levitation of Polymeric Photo-thermal Microgrippers
(University of Waterloo, 2008-09-26)Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for ... -
Modeling and Control of a Magnetically Levitated Microrobotic System
(University of Waterloo, 2006)Magnetically levitated microrobotic systems have shown a great deal of promise for micromanipulation tasks. A new large-gap magnetic suspension system has recently been developed at the University of Waterloo in order ... -
A Multifunctional MEMS Pressure and Temperature Sensor for Harsh Environment Applications
(University of Waterloo, 2013-02-21)The objective of this thesis was to develop a fast-response multifunctional MEMS (Micro Electro Mechanical Systems) sensor for the simultaneous measurement of in-cylinder pressure and temperature in an internal combustion ... -
A multifunctional sensor system for brake system applications
(University of Waterloo, 2015-09-28)The objective of this thesis is to develop a multifunctional MEMS (Micro Electro Mechanical System) sensor system for the simultaneous measurement of pressure and temperature inside a hydraulic system, more specifically a ... -
New Platform Designs for Enabling Atomic Interactions in Solid and Gaseous States
(University of Waterloo, 2023-05-17)This dissertation is composed of two projects that explored two new platforms for measuring atomic interactions using simpler designs than in the literature. The first project of this dissertation designed a platform that ... -
Novel Methods in Ball Bond Reliability Using In-Situ Sensing and On-Chip Microheaters
(University of Waterloo, 2013-01-18)Wire bonding is the process of creating interconnects between the circuitry on a microchip and PCB boards or substrates so that the microchip can interact with the outside world. The materials and techniques used in this ... -
Opto-Mechanical Analysis of a Harsh Environment MEMS Fabry-Perot Pressure Sensor
(University of Waterloo, 2019-04-30)The objective of this thesis is to develop an optically interrogated pressure sensor that is capable of measuring the applied fluid pressure in harsh environments. In its completed state, this sensor is intended be used ... -
Study of a MEMS fiber-optic pressure sensor based on Optical Interferometry.
(University of Waterloo, 2017-11-27)The main focus of this thesis is the development of a MEMS optical pressure sensor capable of giving real-time, accurate measurements to a mid-high pressure range. Some traditional devices for acquisition of parameters ...