Browsing Theses by Subject "Electrostatic MEMS"
Now showing items 1-2 of 2
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Electrostatic MEMS Bifurcation Sensors
(University of Waterloo, 2018-08-24)We report experimental evidence of a new instability in electrostatic sensors, dubbed quasi-static pull-in, in two types of micro-sensors operating in ambient air. We find that the underlying mechanism and features of this ... -
Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing
(University of Waterloo, 2011-12-12)This thesis develops methods to exploit static and dynamic instabilities in electrostatic MEMS to develop new MEMS devices, namely dynamically actuated micro switches and binary micro gas sensors. Models are developed for ...