Spatial Atomic Layer Deposition of Alumina-based Thin Film Encapsulation for High Performance Perovskite Solar Cells

Abstract

In this thesis, various alumina-based thin-film encapsulation layers including nitrogen-doped alumina, zinc-doped alumina and ZnO/Al2O3 nanolaminate structures are deposited by atmospheric-pressure spatial atomic layer deposition (AP-SALD) to investigate their deposition rate, microstructure, and barrier properties. Moreover, the thin-film composition is optimized to maximize the PSC long-term stability in harsh environmental conditions.