Browsing Engineering (Faculty of) by Subject "Thin films"
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Determination of the fracture strength of brittle material thin films at high temperature using MEMS
(University of Waterloo, 2020-01-27)Brittle materials are widely used as structural materials in microelectromechanical systems (MEMS). Their mechanical properties make them suitable for high-temperature environments where MEMS are exposed to different types ... -
An Intelligent Neural Network Controlled Atmospheric Pressure Spatial Atomic Layer Deposition System for Tunable Metal Oxide Thin Films
(University of Waterloo, 2018-08-22)Atmospheric pressure spatial atomic layer deposition (AP-SALD) is a novel thin film fabrication technique to create conformal and pin-hole free films. The growth rate of AP-SALD is hundreds of times greater than conventional ...