Browsing Engineering (Faculty of) by Subject "MEMS device"
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Development of SOI-based Thermally Actuated Micromirror
(University of Waterloo, 2019-09-23)Micromirror is a Micro-Electro-Mechanical Systems (MEMS) device used to steer light by tilting or displacing a reflective surface. It is applied in numerous scanning applications and display technologies such as Light ...