Browsing Theses by Subject "Electrostatic Actuation"

Now showing items 1-3 of 3

Design of an Integrated Electrostatic Atomic Force Microscope

Nafissi, Hamidreza (University of Waterloo, 2018-05-22)

The need for investigation and characterization of physical, chemical and structural properties of material surfaces at the micro and nano scales led to the invention of Atomic Force Microscopy (AFM) in 1986 as a successor ...
Fabrication, Testing and Characterization of MEMS Gyroscope

Almikhlafi, Ridha (University of Waterloo, 2017-05-16)

This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon ...
Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit

Park, Sangtak (University of Waterloo, 2011-09-26)

An electrostatic actuator driven by conventional voltage control and charge control requires high actuation voltage and suffers from the pull-in phenomenon that limits its operation range, much less than its entire gap. ...