Browsing Theses by Author "Rasoulian, Shabnam"
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Uncertainty Analysis and Control of Multiscale Process Systems
Rasoulian, Shabnam (University of Waterloo, 2015-08-13)Microelectronic market imposes tight requirements upon thin film properties, including specific growth rate, surface roughness and thickness of the film. In the thin film deposition process, the microscopic events determine ...