Browsing Theses by Author "Mirsaeedi, Minoo"
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EDA Solutions for Double Patterning Lithography
Mirsaeedi, Minoo (University of Waterloo, 2012-08-30)Expanding the optical lithography to 32-nm node and beyond is impossible using existing single exposure systems. As such, double patterning lithography (DPL) is the most promising option to generate the required lithography ...