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dc.contributor.authorYeow, John
dc.contributor.authorSun, Zhendong
dc.contributor.authorWong, Lawrence
dc.contributor.authorSuo, Xudong
dc.contributor.authorSun, Weijie
dc.contributor.authorZheng, Zhou 20:33:12 (GMT) 20:33:12 (GMT)
dc.descriptionThe final publication is available at Elsevier via © 2015. This version is made available under the CC-BY-NC-ND 4.0 license
dc.description.abstractA highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs) with rectangular membranes under electrostatic pressure has been formulated. The rectangular diaphragms have a thickness range of 0.6–1.5 μm and a side length range of 100–1000 μm. The new deflection shape function generates deflection profiles that are in excellent agreement with finite element analysis (FEA) results for a wide range of geometry dimensions and loading conditions. The deflection shape function is used to analyze membrane deformations and to calculate the capacitances between the deformed membranes and the fixed back plates. In 50 groups of random tests, compared with FEA results, the calculated capacitance values have a maximum deviation of 1.486% for rectangular membranes. The new analytical deflection function can provide designers with a simple way of gaining insight into the effects of designed parameters for CMUTs and other MEMS-based capacitive type sensors.en
dc.description.sponsorshipNational Basic Research Program of China under Grant 2014CB845302 and by National Natural Science Foundation (NNSF) of China under Grants 61374036, 61273121, and Natural Science Foundation of Guangdong Province under Grant 2014A030313237, and by Natural Science and Engineering Research Council of Canada.en
dc.relation.ispartofseriesSensing and Bio-Sensing Research;5en
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 International*
dc.subjectCapacitive micromachined ultrasonic transducersen
dc.subjectFinite element analysisen
dc.subjectDeflection shape functionen
dc.titleA novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragmsen
dcterms.bibliographicCitationZhou Zheng, Weijie Sun, Xudong Suo, Lawrence L.P. Wong, Zhendong Sun, John T.W. Yeow, A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms, Sensing and Bio-Sensing Research, Volume 5, September 2015, Pages 62-70, ISSN 2214-1804, (//
uws.contributor.affiliation1Faculty of Engineeringen
uws.contributor.affiliation2Systems Design Engineeringen

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