Browsing Waterloo Research by Author "Song, Bo"
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Spatial Atomic Layer Deposition of Nitrogen-doped Alumina Thin Films for High-Performance Perovskite Solar Cell Encapsulation
Asgarimoghaddam, Hatameh; Chen, Qiaoyun; Ye, Fan; Shahin, Ahmed; Marchione, Olivia; Song, Bo; Musselman, Kevin (Elsevier, 2024-08)An atmospheric-pressure spatial atomic layer deposition (AP-SALD) system is used to deposit nitrogen-doped alumina (N-AlOx) thin-film-encapsulation layers. The rapid nature of the AP-SALD process facilitates deposition of ...