Browsing Systems Design Engineering by Subject "MEMS Gyroscope"
Now showing items 1-2 of 2
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Design, Modeling, and Nonlinear Dynamics of a Cantilever Beam-Rigid Body Microgyroscope
(University of Waterloo, 2013-12-06)A new type of cantilever beam gyroscope is introduced, modeled, and analyzed. The main structure includes a cantilever beam and a rigid body attached to the free end of the beam. The model accounts for the eccentricity, ... -
Fabrication, Testing and Characterization of MEMS Gyroscope
(University of Waterloo, 2017-05-16)This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon ...