Browsing Systems Design Engineering by Subject "ELECTROSTATIC"
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Combined Electrostatic/Electromagnetic MEMS Actuators
(University of Waterloo, 2016-08-10)In this work, one and two degrees of freedom (DOF) lumped mass models of Micro- Electro-Mechanical System (MEMS) actuators are introduced, investigated, and compared to experimental results. A one degree of freedom system ...