Browsing Mechanical and Mechatronics Engineering by Author "Silas, Ifeanyi"
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Advancing the Industrialization of Thin Film Deposition: Tools for Mitigating Powder Formation in Spatial-ALD Systems and for Real-time, In-situ Metrology
Silas, Ifeanyi (University of Waterloo, 2024-01-11)Thin-film manufacturing through Spatial Atomic Layer Deposition (SALD) offers high throughput and cost-saving advantages, but challenges such as powder formation and the lack of real-time in-situ metrology hinder its ...