Browsing Engineering (Faculty of) by Subject "Novel Resist and Applications"
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Nanofabrication Using Electron Beam Lithography: Novel Resist and Applications
(University of Waterloo, 2013-09-04)This thesis addresses nanostructure fabrication techniques based on electron beam lithography, which is the most widely employed nanofabrication techniques for R&D and for the prototyping or production of photo-mask or ...