Browsing Engineering (Faculty of) by Subject "Graphene dry etching"
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Block Copolymer Self-assembly and Graphene Dry Etching
(University of Waterloo, 2015-03-13)This thesis focuses on interpreting the use of block copolymer self-assembly in nanolithography. Block copolymers are attractive materials for nanofabrication due to their ability to phase separate into ordered and chemically ...