Design and Implementation of a High Resolution CMOS X-Ray Imager with Amorphous Selenium Sensor
Abstract
This thesis presents a novel system for high resolution X-ray imaging in medical and
industrial applications. Complementary metal-oxide-semiconductor (CMOS) technology is
a standard technology used in most state of the art electronic systems including imagers.
In addition, amorphous selenium (a-Se) is a photoconductor that is sensitive to a wide
range of X-ray photon energies.
Increasing the e ective spatial resolution is one the primary goals of state of the art
imaging systems. The objective of this thesis is to integrate the a-Se sensor and CMOS
readout to make an ultra high resolution X-ray imager. Other features of the imager like
noise, dynamic range, imaging speed, and ll factor are competitive with existing X-ray
imaging systems. All of the signal reading circuitry is implemented on a custom CMOS
chip and the a-Se sensor is deposited on top of it through post processing. This thesis
also describe the design of external hardware and software needed to properly operate the
imager.
We demonstrate our imager with a 64 × 64 pixel array prototype containing 5.6 × 6.25 μm2 and 11.2 × 6.25 μm2 pixel. Our results include characterization of the electronic
and X-ray imaging performance of our system. We also show X-ray images with e ective
resolution down to 14 μm.
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Cite this version of the work
Alireza Parsafar
(2015).
Design and Implementation of a High Resolution CMOS X-Ray Imager with Amorphous Selenium Sensor. UWSpace.
http://hdl.handle.net/10012/9355
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