Browsing Theses by Subject "bottom-gate TFT thin film transistor pulsed PECVD plasma enhanced chemical deposition David Grant MVSystems Waterloo Masters"

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Bottom-Gate TFTs With Channel Layer Deposited by Pulsed PECVD

Grant, David James (University of Waterloo, 2004)

Nanocrystalline silicon (nc-Si:H) is a promising material for Thin-Film Transistors (TFTs) offering potentially higher mobilities and improved stability over hydrogenated amorphous silicon (a-Si:H). The slow growth rate ...