Browsing Theses by Subject "Microelectromechanical Systems"
Now showing items 1-4 of 4
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Integrated MEMS-Based Phase Shifters
(University of Waterloo, 2008-05-13)Multilayer microwave circuit processing technology is essential in developing more compact radio frequency (RF) electronically scanned arrays (ESAs) for next generation radar systems. ESAs are typically realized using the ... -
Optical MEMS Switches: Theory, Design, and Fabrication of a New Architecture
(University of Waterloo, 2007-06-28)The scalability and cost of microelectromechanical systems (MEMS) optical switches are now the important factors driving the development of MEMS optical switches technology. The employment of MEMS in the design and fabrication ... -
Polycrystalline Silicon Capacitive MEMS Strain Sensor for Structural Health Monitoring of Wind Turbines
(University of Waterloo, 2016-12-21)Wind energy is a fast-growing sustainable energy technology and driven by the need for more efficient energy harvesting, size of the wind turbines has increased over the years for both off-shore and land-based installations. ... -
Single-Chip Scanning Probe Microscopes
(University of Waterloo, 2014-01-02)Scanning probe microscopes (SPMs) are the highest resolution imaging instruments available today and are among the most important tools in nanoscience. Conventional SPMs suffer from several drawbacks owing to their large ...