Design and Characterization of an 8x8 Lateral Detector Array for Digital X-Ray Imaging

Abstract

X-ray imaging has become one of the most pervasive and effective means of diagnosis in medical clinics today. As more imaging systems transition to digital modes of capture and storage, new applications of x-ray imaging, such as tomosynthesis, become feasible. These new imaging modalities have the potential to expose patients to large amounts of radiation so the necessity to use sensitive imagers that reduce dose and increase contrast is essential. An experimental design that utilizes laterally oriented detectors and amorphous semiconductors on crystalline silicon substrates has been undertaken in this study. Emphasis on fabricating a device suitable for medical x-ray imaging is the key principle throughout the design process. This study investigates the feasibility and efficiency of a new type of x-ray imager that combines the high speed, low noise, and potential complexity of CMOS circuit design with the high responsivity, large area uniformity, and flexibility of amorphous semiconductors. Results show that the design tradeoffs made in order to create a low cost, high fill factor, and high speed imager are realistic. The device exhibits good responsively to optical light, possesses a sufficient capacitive well, and maintains CMOS characteristics. This study demonstrates that with sufficient optimization it may be possible to design and deploy real time x-ray system on chip imagers similar to those used in optical imaging.