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Design and Implementation of a Controller for an Electrostatic MEMS Actuator and Sensor

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Seleim_Abdulrahman.pdf (19.15 MB)

Date

2010-05-21T20:49:09Z

Authors

Seleim, Abdulrahman Saad

Journal Title

Journal ISSN

Volume Title

Publisher

University of Waterloo

Abstract

An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable travel range up to 90% of the gap. As a sensor the beam is to be driven into chaotic motion which is very sensitive changes in the system parameters. Two versions of the controller have been analyzed and implemented, one for the actuator and one for the sensor. For the actuator, preliminary experiments show good matching with the model. As for the sensor, the dynamic behavior have been studied and the best operating regions have been determined.

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Keywords

MEMS, Chaos, Mass Sensor, Bifurcation diagram, Lyapunov exponent

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Citation

URI

http://hdl.handle.net/10012/5243

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Theses
Systems Design Engineering