Browsing Waterloo Institute for Nanotechnology by Author "Yeow, Travis"
Now showing items 1-1 of 1
-
In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
Mistry, Kissan; Jones, Alex; Kao, Manfred; Yeow, Travis; Yavuz, Mustafa; Musselman, Kevin (IOP Science, 2020-06-01)Atmospheric pressure—spatial atomic layer deposition (AP-SALD) is a promising open-air deposition technique for high-throughput manufacturing of nanoscale films, yet the nucleation and property evolution in these films has ...