Browsing Systems Design Engineering by Subject "Mass Sensor"
Now showing items 1-1 of 1
-
Design and Implementation of a Controller for an Electrostatic MEMS Actuator and Sensor
(University of Waterloo, 2010-05-21)An analog controller has been analyzed and built for an electrostatic micro-cantilever beam. The closed loop MEMS device can be used as both actuator and sensor. As an actuator it will have the advantage of large stable ...