Browsing Systems Design Engineering by Subject "Gas sensors"
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Use of Instabilities in Electrostatic Micro-Electro-Mechanical Systems for Actuation and Sensing
(University of Waterloo, 2011-12-12)This thesis develops methods to exploit static and dynamic instabilities in electrostatic MEMS to develop new MEMS devices, namely dynamically actuated micro switches and binary micro gas sensors. Models are developed for ...