Browsing Systems Design Engineering by Subject "Electrostatic Actuation"
Now showing items 1-2 of 2
-
Fabrication, Testing and Characterization of MEMS Gyroscope
(University of Waterloo, 2017-05-16)This thesis presents the design, fabrication and characterization of two Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes fabricated using the Silicon-On-Insulator-Multi-User-MEMS Process (SOIMUMPs) and Polysilicon ... -
Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit
(University of Waterloo, 2011-09-26)An electrostatic actuator driven by conventional voltage control and charge control requires high actuation voltage and suffers from the pull-in phenomenon that limits its operation range, much less than its entire gap. ...