Browsing Systems Design Engineering by Subject "Capacitive micromachined ultrasonic transducers"
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A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms
(Elsevier, 2015-07-15)A highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs) with rectangular membranes under electrostatic pressure has been ...