Now showing items 1-2 of 2

    • MEMS Demodulator Based on Electrostatic Actuator 

      Chung, So-Ra (Serena) (University of Waterloo, 2013-01-25)
      This thesis provides analysis and modeling for one of the Micro-Eletro-Mechanical System (MEMS) electrostatic actuator that consists of a micro-plate at the end of a cantilever beam, and introduces different type of MEMS ...
    • Micro-electro-thermo-magnetic Actuators for MEMS Applications 

      Forouzanfar, Sepehr (University of Waterloo, 2008-04-08)
      This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced ...

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