Browsing Systems Design Engineering by Author "Zheng, Zhou"
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Capacitive Micromachined Ultrasonic Transducers (CMUTs) for Humidity Sensing
Zheng, Zhou (University of Waterloo, 2019-09-11)In the last two decades, capacitive micromachined ultrasonic transducers (CMUTs) have proven themselves to be promising for various ultrasound imaging and chemical sensing applications. Although holding many benefits for ... -
A novel deflection shape function for rectangular capacitive micromachined ultrasonic transducer diaphragms
Yeow, John; Sun, Zhendong; Wong, Lawrence; Suo, Xudong; Sun, Weijie; Zheng, Zhou (Elsevier, 2015-07-15)A highly accurate analytical deflection shape function that describes the deflection profiles of capacitive micromachined ultrasonic transducers (CMUTs) with rectangular membranes under electrostatic pressure has been ...