Browsing Mechanical and Mechatronics Engineering by Subject "Fabry - Perot"
Now showing items 1-1 of 1
Study of a MEMS fiber-optic pressure sensor based on Optical Interferometry. (University of Waterloo, 2017-11-27)The main focus of this thesis is the development of a MEMS optical pressure sensor capable of giving real-time, accurate measurements to a mid-high pressure range. Some traditional devices for acquisition of parameters ...