Browsing Mechanical and Mechatronics Engineering by Author "Teoh, Chee Hau"
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Development of a Novel Commercial-Scale Atmospheric Pressure Spatial Atomic Layer Deposition System
Teoh, Chee Hau (University of Waterloo, 2020-09-09)Atmospheric pressure spatial atomic layer deposition (AP-SALD) is an advanced thin-film fabrication technique. It can produce high quality (uniform, conformal, pin-hole free), large-area ultrathin films at speeds up to ...