Browsing Engineering (Faculty of) by Supervisor "Abdel-Rahmanl, Eihab"
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Electrostatic Bifurcation In-Plane Sensors
(University of Waterloo, 2022-01-24)Electrostatic MEMS sensors are known for their high sensitivity, wide range of operation, and quick response. These unique attributes give Electrostatic MEMS sensors an edge over other MEMS transduction mechanisms ...