Browsing Engineering (Faculty of) by Author "Yan, Zheng"
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Silicon dry etching using fluorine-based gas for nanoscale cone and grating structure fabrication Yan, Zheng (University of Waterloo, 2022-01-27)Dry etching technique is widely used in creating high aspect ratio nanostructures currently. This pattern transfer process has better performance in the profile controlling compared with wet etching technique. For the ...