Browsing Theses by Author "Jilesen, Jonathan"
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Multi-scale Modeling of Chemical Vapor Deposition: From Feature to Reactor Scale
Jilesen, Jonathan (University of Waterloo, 2009-09-25)Multi-scale modeling of chemical vapor deposition (CVD) is a very broad topic because a large number of physical processes affect the quality and speed of film deposition. These processes have different length scales ...