Browsing Theses by Author "Tazabekov, Olzhas"
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CMOS-MEMS Resonant Gate Transistor-Based Devices
Tazabekov, Olzhas (University of Waterloo, 2015-05-25)The development of the semiconductor industry in general and IC (Integrated Circuits) fabrication technologies in particular enabled the miniaturization of moving electro-mechanical structures down to micrometer size. This ...