Browsing University of Waterloo by Subject "Silicon Nitride"
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Determination of the fracture strength of brittle material thin films at high temperature using MEMS
(University of Waterloo, 2020-01-27)Brittle materials are widely used as structural materials in microelectromechanical systems (MEMS). Their mechanical properties make them suitable for high-temperature environments where MEMS are exposed to different types ... -
Polycrystalline Silicon Capacitive MEMS Strain Sensor for Structural Health Monitoring of Wind Turbines
(University of Waterloo, 2016-12-21)Wind energy is a fast-growing sustainable energy technology and driven by the need for more efficient energy harvesting, size of the wind turbines has increased over the years for both off-shore and land-based installations. ...