Browsing University of Waterloo by Subject "Mechatronic design"
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Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner
(University of Waterloo, 2016-12-01)Precision motion systems find a broad range of application in various fields such as micro/nano machining tools, lithography scanners, testing and metrology machines, micro-assembly, biotechnology, optics manufacturing, ...