Browsing University of Waterloo by Author "Arabi, Mohamed"
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Electrostatic Bifurcation In-Plane Sensors
Arabi, Mohamed (University of Waterloo, 2022-01-24)Electrostatic MEMS sensors are known for their high sensitivity, wide range of operation, and quick response. These unique attributes give Electrostatic MEMS sensors an edge over other MEMS transduction mechanisms ...