Statistics for In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
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In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system. | 33 |
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Mistry_2020_Nano_Express_1_010045.pdf(legacy) | 31 |
Mistry_2020_Nano_Express_1_010045.pdf | 23 |
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