Statistics for Effect of phosphorus doping on Young's modulus and residual stress of polysilicon thin films
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| Effect of phosphorus doping on Young's modulus and residual stress of polysilicon thin films | 66 |
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| June 2024 | 16 |
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| Thesis_v3_corrections.pdf(legacy) | 40 |
| Thesis_v3_corrections.pdf | 15 |
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