Statistics for Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging
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| Design, Fabrication, and Characterization of a 2-D SOI MEMS Micromirror with Sidewall Electrodes for Confocal MACROscope Imaging | 63 |
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| January 2025 | 1 |
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| Yanhui_Bai.pdf(legacy) | 158 |
| Yanhui_Bai.pdf | 107 |
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