Amarloo, Hadi2018-02-152019-02-202018-02-152018-02-14http://hdl.handle.net/10012/13006Waveguides (components which convey electromagnetic waves between points) are essential building blocks within miniaturized systems for all ranges of frequency and applications, including those in the Terahertz (THz) frequency gap. Although metallic THz waveguides have been available since a few decades ago and have been used extensively for THz applications, dielectric waveguides appear to be a more promising choice for THz systems that need to be low cost and compact. Silicon-on-Glass (SOG) technology, a relatively recent concept, has demonstrated remarkable performance for frequencies up to 1 THz. In this thesis, two new THz dielectric waveguide structures are proposed and investigated theoretically and experimentally: 1) a THz line{defect photonic crystal waveguide based on SOG technology, and 2) a structure which uses benzocyclobutene (BCB) to create a Silicon-BCB-Quartz (SBQ) platform. Such THz dielectric waveguide structures could form the fundamental building blocks for numerous different THz systems. In this thesis research, the application of these waveguide structures for waveguide-based THz absorption spectroscopy is studied and investigated experimentally.enTerahertz TechnologySilicon WaveguidesAbsorption SpectroscopyDoctoral Thesis