Browsing Systems Design Engineering by Author "Saritas, Resul"
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Dynamic Scanning Probe Lithography and Its Applications
Saritas, Resul (University of Waterloo, 2022-01-25)This dissertation presents a novel, benchtop, low-cost, high-throughput direct surface patterning method dubbed dynamic-Scanning Probe Lithography (d-SPL). It employs a scriber mounted via a spring-damper mechanism to a ...