Browsing Systems Design Engineering by Author "Park, Sangtak"
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Low Voltage Electrostatic Actuation and Displacement Measurement through Resonant Drive Circuit
Park, Sangtak (University of Waterloo, 2011-09-26)An electrostatic actuator driven by conventional voltage control and charge control requires high actuation voltage and suffers from the pull-in phenomenon that limits its operation range, much less than its entire gap. ...