Browsing Systems Design Engineering by Author "Forouzanfar, Sepehr"
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Micro-electro-thermo-magnetic Actuators for MEMS Applications
Forouzanfar, Sepehr (University of Waterloo, 2008-04-08)This research focuses on developing new techniques and designs for highly con- trollable microactuating systems with large force-stroke outputs. A fixed-fixed mi- crobeam is the actuating element in the introduced ...