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    • Resonant Drive Techniques for MEMS: A Comparative Study 

      Abdelrahman, Rana (University of Waterloo, 2023-06-12)
      Electrostatic actuation is popular in microelectromechanical systems (MEMS) because of its many advantages. However, it requires high voltage, typically provided by a power supply and a high voltage amplifier, which is ...


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