Now showing items 1-6 of 6
A Large-Stroke Electrostatic Micro-Actuator
(University of Waterloo, 2011-01-17)
Parallel-plate electrostatic actuators driven by a voltage difference between two electrodes suffer from an operation range limited to 30% of the gap that has significantly restrained their applications in Microelectromechanical ...
A Multifunctional MEMS Pressure and Temperature Sensor for Harsh Environment Applications
(University of Waterloo, 2013-02-21)
The objective of this thesis was to develop a fast-response multifunctional MEMS (Micro Electro Mechanical Systems) sensor for the simultaneous measurement of in-cylinder pressure and temperature in an internal combustion ...
Development Of a Novel Multi-disciplinary Design Optimization Scheme For Micro Compliant Devices
(University of Waterloo, 2008-09-25)
The focus of this research is on the development of a novel multi-disciplinary design optimization scheme for micro-compliant devices. Topology optimization is a powerful tool that can address the need for a systematic ...
Analysis and Modeling of Uncooled Microbolometers with Tunable Thermal Conductance
(University of Waterloo, 2009-05-20)
Uncooled microbolometers have attracted significant interest due to their small size, low cost and low power consumption. As the application range of microbolometers broadens, increasing the dynamic range becomes one of ...
Automated Micromanipulation of Micro Objects
(University of Waterloo, 2011-08-26)
In recent years, research efforts in the development of Micro Electro Mechanical Systems, (MEMS) including microactuators and micromanipulators, have attracted a great deal of attention. The development of microfabrication ...
Magnetic Levitation of Polymeric Photo-thermal Microgrippers
(University of Waterloo, 2008-09-26)
Precise manipulation of micro objects became great interest in engineering and science with the advancements in microengineering and microfabrication. In this thesis, a magnetically levitated microgripper is presented for ...