Browsing Mechanical and Mechatronics Engineering by Subject "in-situ characterization"
Now showing items 1-2 of 2
-
Applications of Reflectometry Towards the Development of MEMS Gas Sensors
(University of Waterloo, 2021-05-27)Reflectometry or reflectance spectroscopy is a relatively simple characterization technique based on the analysis of reflected light from a surface. Herein, reflectometry is used to attain significant insights towards the ... -
In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system.
(IOP Science, 2020-06-01)Atmospheric pressure—spatial atomic layer deposition (AP-SALD) is a promising open-air deposition technique for high-throughput manufacturing of nanoscale films, yet the nucleation and property evolution in these films has ...