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E-beam Lithography using Dry Powder HSQ Resist Having Long Shelf Life and Nanogap Electrode Fabrication
(University of Waterloo, 2018-09-28)
As the industry of nanofabrication developing, high-resolution e-beam lithography (EBL) becomes more and more important. In this thesis, it is discussed that the effective factors behind the resolution of EBL and how it ...