Browsing Electrical and Computer Engineering by Supervisor "Bo, Cui"
Now showing items 1-2 of 2
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E-beam Lithography using Dry Powder HSQ Resist Having Long Shelf Life and Nanogap Electrode Fabrication
(University of Waterloo, 2018-09-28)As the industry of nanofabrication developing, high-resolution e-beam lithography (EBL) becomes more and more important. In this thesis, it is discussed that the effective factors behind the resolution of EBL and how it ... -
Nanofabrication of direct positioning atomic force microscope (AFM) probes and a novel method to attain controllable lift-off
(University of Waterloo, 2017-01-23)This thesis focuses on nanofabrication and its applications in the area related to atomic force microscope (AFM) probes and a novel way of constructing the bi-layer system for liftoff. The contribution of this thesis is ...