Browsing Engineering (Faculty of) by Subject "Fabry - Perot"
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Study of a MEMS fiber-optic pressure sensor based on Optical Interferometry.
(University of Waterloo, 2017-11-27)The main focus of this thesis is the development of a MEMS optical pressure sensor capable of giving real-time, accurate measurements to a mid-high pressure range. Some traditional devices for acquisition of parameters ...