Browsing Engineering (Faculty of) by Subject "Dynamic Error Budgeting"
Now showing items 1-2 of 2
-
Mechatronic design, actuator optimization, and control of a long stroke linear nano-positioner
(Elsevier, 2018-04-01)In this paper, mechatronic design, actuator optimization and controls of a long-stroke (20 mm) linear nano-positioner are presented. The mechatronic design is described in terms of the stage's most prominent features ... -
Mechatronic Design, Dynamics, Controls, and Metrology of a Long-Stroke Linear Nano-Positioner
(University of Waterloo, 2016-12-01)Precision motion systems find a broad range of application in various fields such as micro/nano machining tools, lithography scanners, testing and metrology machines, micro-assembly, biotechnology, optics manufacturing, ...